The Journal of Info Technology and Pc Science (JITeCS) is a peer-reviewed open entry journal published by School of Laptop Science, Universitas Brawijaya (UB), Indonesia. So as to create sub micron vias between metallic layers on silicon IC circuits, the tungsten crammed via processes have been in a continuing state of development over the past 15 years. Processing is advanced, expensive, and tough to breed. The introduction of galvanic cells, by way of undercutting, and exposed plugs are simply a number of the plagues that have hit a number of users of the technology. Discussed on this paper is an alternative approach to the complex tungsten stuffed by way of interconnect process. The proposed course of yields nicely at sub micron geometries, is straightforward to perform, and is cheap in comparison with the tungsten crammed through course of. Contact resistance improves vastly over the standard tungsten course of. The check run achieved a imply value of zero.25 ohms per via compared to historic tungsten process that yields zero.4 ohms per through. The distribution was additionally excellent with sigma recorded at 0.025 ohms per by way of.
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